Semiconductor measurement technology : thin film reference materials development final report for CRADA CN-1364 /
Збережено в:
| Формат: | Книга |
|---|---|
| Мова: | Undetermined |
| Опубліковано: |
Gaithersburg, MD :
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,
1998.
|
| Серія: | 830NIST special publication ;
400-100 |
| Предмети: |
| Фізичний опис: | 38 p. ; 29 cm. |
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