Semiconductor measurement technology : thin film reference materials development final report for CRADA CN-1364 /

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书目详细资料
格式: 图书
语言:Undetermined
出版: Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, 1998.
丛编:830NIST special publication ; 400-100
主题:
实物特征
实物描述:38 p. ; 29 cm.