Semiconductor measurement technology : thin film reference materials development final report for CRADA CN-1364 /

Semiconductor measurement technology : thin film reference materials development final report for CRADA CN-1364 /

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Bibliographic Details
Format: Book
Language:Undetermined
Published: Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, 1998.
Series:830NIST special publication ; 400-100
Subjects:
Silica > United States.
Thin-film circuits.
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245 0 0 |a Semiconductor measurement technology :  |b thin film reference materials development final report for CRADA CN-1364 /  |c Barbara J. Belzer ... [et al.]. 
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