Semiconductor measurement technology : thin film reference materials development final report for CRADA CN-1364 /

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Bibliographic Details
Format: Book
Language:Undetermined
Published: Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, 1998.
Series:830NIST special publication ; 400-100
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Call Number: A3:AE31C0 F06472
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