Semiconductor measurement technology : thin film reference materials development final report for CRADA CN-1364 /

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Bibliografiska uppgifter
Materialtyp: Bok
Språk:Undetermined
Publicerad: Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, 1998.
Serie:830NIST special publication ; 400-100
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