The Capabilities and limitations of auger sputter profiling for studies of semiconductors /
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| Corporate Authors: | , |
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| Other Authors: | |
| Format: | Government Document Book |
| Language: | English |
| Published: |
Washington, D.C :
U.S. Dept. of Commerce, National Bureau of Standards,
1981.
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| Series: | NBS special publication ;
400-67 Semiconductor measurement technology |
| Subjects: |
| Item Description: | "Issued September 1981.". Item 247 (microfiche). |
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| Physical Description: | vi, 46 p. : ill ; 26 cm. |
| Bibliography: | Includes bibliographical references. |