The engineering of microelectronic thin and thick films /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
London :
Macmillan,
1976.
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| Subjects: |
| Item Description: | Bibliography: p. 168-174. |
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| Physical Description: | 176 p. : ill. |
| ISBN: | 0333186559 |