Smart electronics and MEMS /
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| Corporate Author: | |
|---|---|
| Other Authors: | , , |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash. :
SPIE,
c1997.
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 3242. |
| Subjects: |
| Physical Description: | xi, 398 p. : ill. (some col.) ; 28 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0819426806 |
| ISSN: | 0277-786X ; |