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01798cam a2200397 a 4500 |
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CARM |
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20120507102252.0 |
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|a TK7874
|b .S573 1997
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| 082 |
0 |
4 |
|a 620.11
|2 21
|
| 245 |
0 |
0 |
|a Smart electronics and MEMS /
|c Ahsan Hariz, Vijay K. Varadan, Olaf Reinhold, chairs/editors.
|
| 260 |
|
|
|a Bellingham, Wash. :
|b SPIE,
|c c1997.
|
| 300 |
|
|
|a xi, 398 p. :
|b ill. (some col.) ;
|c 28 cm.
|
| 490 |
1 |
|
|a SPIE proceedings series,
|x 0277-786X ;
|v v. 3242
|
| 504 |
|
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|a Includes bibliographical references and index.
|
| 518 |
|
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|a 11-13 December 1997, Adelaide, South Australia.
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| 536 |
|
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|a Sponsored by University of South Australia, MEC (The Microelectronics Centre (Australia)), DSTO (Defense Science and Technology Organisation (Australia)), SPIE (The International Society for Optical Engineering)
|
| 650 |
|
0 |
|a Smart materials
|v Congresses.
|
| 650 |
|
0 |
|a Microelectromechanical systems
|x Materials
|v Congresses.
|
| 700 |
1 |
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|a Varadan, V. K.,
|d 1943-
|
| 700 |
1 |
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|a Hariz, Ahsan.
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| 700 |
1 |
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|a Reinhold, Olaf.
|
| 710 |
2 |
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|a International Society for Optical Engineering.
|
| 852 |
8 |
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| 852 |
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| 830 |
|
0 |
|a Proceedings of SPIE--the International Society for Optical Engineering ;
|v v. 3242.
|
| 999 |
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