Smart electronics and MEMS /

Smart electronics and MEMS /

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Bibliographic Details
Corporate Author: International Society for Optical Engineering
Other Authors: Varadan, V. K., 1943-, Hariz, Ahsan, Reinhold, Olaf
Format: Book
Language:English
Published: Bellingham, Wash. : SPIE, c1997.
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 3242.
Subjects:
Smart materials > Congresses.
Microelectromechanical systems > Materials > Congresses.
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Smart structures and materials 1998. 2-4 March 1998, San Diego, California /
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Published 1998
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Smart structures and materials 1997. 4-6 March 1997, San Diego, California /
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Published 1997
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