High-K gate dielectrics /
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| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
Bristol ; Philadelphia :
Institute of Physics,
c2004.
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| Series: | Series in materials science and engineering
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| Subjects: | |
| Online Access: | Book review (E-STREAMS) Publisher description |
| Physical Description: | xi, 601 p. : ill. ; 25 cm. |
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| Bibliography: | Includes bibiographical references and index. |
| ISBN: | 0750309067 (hbk.) |