Preparation and certification of SRM-2530, ellipsometric parameters [delta] and [psi] and derived thickness and refractive index of a silicon dioxide layer on silicon /
Saved in:
| Corporate Author: | |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Gaithersburg, MD : Washington, DC :
U.S. Dept. of Commerce, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O.,
1988.
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| Series: | Standard reference materials
NIST special publication ; 260-109 |
| Subjects: |
CARM 1 Store
| Call Number: |
A2:AK28C0 D03680 |
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| Copy 1 | Available Place a Hold |