Journal of vacuum science & technology. an official journal of the American Vacuum Society. B, Microelectronics processing and phenomena :
Kaydedildi:
| Yeni Başlık: | Journal of vacuum science & technology. B, Microelectronics and nanometer structures |
|---|---|
| Önceki Başlık: | Journal of vacuum science and technology |
| Kurumsal yazarlar: | , |
| Materyal Türü: | Dergi |
| Dil: | English |
| Baskı/Yayın Bilgisi: |
New York, N.Y. :
Published for the Society by the American Institute of Physics,
1983-c1990.
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| Konular: |
CARM 1 Store
| Yer Numarası: |
A3:AB23D4 D01721 |
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| Kopya Bilgisi 1 | Kütüphanede Rezerve |