Journal of vacuum science & technology. an official journal of the American Vacuum Society. B, Microelectronics processing and phenomena :
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| New Title: | Journal of vacuum science & technology. B, Microelectronics and nanometer structures |
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| Previous Title: | Journal of vacuum science and technology |
| Corporate Authors: | , |
| Format: | Journal |
| Language: | English |
| Published: |
New York, N.Y. :
Published for the Society by the American Institute of Physics,
1983-c1990.
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| Subjects: |
| Published: | 2nd ser., v. 1, no. 1 (Jan.-Mar. 1983)-2nd ser., v. 8, no. 6 (Nov./Dec. 1990). |
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| Item Description: | Title from cover. |
| Physical Description: | 8 v. : ill. ; 29 cm. Issued also on microfilm. |
| Publication Frequency: | Bimonthly, <Jan./Feb. 1985-> |
| ISSN: | 0734-211X 0022-5355 1071-1023 |
| Related Items: | Includes: International Symposium on Electron, Ion, and Photon Beams. Proceedings of the ... International Symposium on Electron, Ion, and Photon Beams; and: Molecular Beam Epitaxy Workshop. Proceedings of the ... Molecular Beam Epitaxy Workshop, also issued separately. |