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| LEADER |
03415nas a2200625 a 4500 |
| 001 |
c000151483 |
| 003 |
CARM |
| 005 |
20020205155209.0 |
| 008 |
830415d19831990nyubr1p 0 a0eng d |
| 010 |
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|a 83642371 //r942
|z sn 82003446
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| 019 |
1 |
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|a 2514477
|5 LACONCORD2021
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| 022 |
0 |
|
|a 0734-211X
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| 030 |
|
|
|a JVTBD9
|
| 032 |
|
|
|a 718090
|b USPS
|
| 035 |
|
|
|a (OCoLC)8697479
|5 LACONCORD2021
|
| 037 |
|
|
|b AIP Subscription Fulfillment Division, 500 Sunnyside Blvd., Woodbury, NY 11797
|
| 037 |
|
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|c $200.00 (U.S.)
|c $210.00 (foreign)
|
| 040 |
|
|
|a LC
|b eng
|c LC
|
| 042 |
|
|
|a lc
|a nsdp
|
| 050 |
|
0 |
|a TJ940
|b .J669
|
| 082 |
0 |
4 |
|a 621.5/5/05
|2 19
|
| 210 |
0 |
|
|a J. vac. sci. technol., B Microelectron. process. phenom
|
| 222 |
|
0 |
|a Journal of vacuum science & technology. B, Microelectronics processing and phenomena
|
| 245 |
0 |
0 |
|a Journal of vacuum science & technology.
|n B,
|p Microelectronics processing and phenomena :
|b an official journal of the American Vacuum Society.
|
| 246 |
3 |
0 |
|a Journal of vacuum science and technology.
|n B,
|p Microelectronics processing and phenomena
|
| 246 |
3 |
0 |
|a Microelectronics processing and phenomena
|
| 260 |
|
|
|a New York, N.Y. :
|b Published for the Society by the American Institute of Physics,
|c 1983-c1990.
|
| 300 |
|
|
|a 8 v. :
|b ill. ;
|c 29 cm.
|
| 310 |
|
|
|a Bimonthly,
|b <Jan./Feb. 1985->
|
| 321 |
|
|
|a Quarterly,
|b Jan.-Mar. 1983-
|
| 362 |
0 |
|
|a 2nd ser., v. 1, no. 1 (Jan.-Mar. 1983)-2nd ser., v. 8, no. 6 (Nov./Dec. 1990).
|
| 500 |
|
|
|a Title from cover.
|
| 510 |
1 |
|
|a Computer & control abstracts
|x 0036-8113
|b Jan.-March 1983-
|
| 510 |
1 |
|
|a Electrical & electronics abstracts
|x 0036-8105
|b Jan.-March 1983-
|
| 510 |
1 |
|
|a Physics abstracts. Science abstracts. Series A
|x 0036-8091
|b Jan.-March 1983-
|
| 510 |
1 |
|
|a SPIN
|b 1983-
|
| 510 |
2 |
|
|a Chemical abstracts
|x 0009-2258
|
| 510 |
2 |
|
|a Coal abstracts
|x 0309-4979
|
| 510 |
2 |
|
|a Current physics index
|x 0098-9819
|
| 510 |
2 |
|
|a Metals abstracts
|x 0026-0924
|
| 510 |
2 |
|
|a World aluminum abstracts
|x 0002-6697
|
| 530 |
|
|
|a Issued also on microfilm.
|
| 580 |
|
|
|a Includes: International Symposium on Electron, Ion, and Photon Beams. Proceedings of the ... International Symposium on Electron, Ion, and Photon Beams; and: Molecular Beam Epitaxy Workshop. Proceedings of the ... Molecular Beam Epitaxy Workshop, also issued separately.
|
| 650 |
|
0 |
|a Vacuum technology
|x Periodicals.
|
| 710 |
2 |
|
|a American Vacuum Society.
|
| 710 |
2 |
|
|a American Institute of Physics.
|
| 780 |
0 |
1 |
|t Journal of vacuum science and technology
|x 0022-5355
|w (DLC) 68053979
|w (OCoLC)1754855
|
| 785 |
0 |
0 |
|t Journal of vacuum science & technology. B, Microelectronics and nanometer structures
|x 1071-1023
|w (DLC) 94657460
|w (OCoLC)23276603
|
| 787 |
1 |
|
|a Molecular Beam Epitaxy Workshop.
|t Proceedings of the ... Molecular Beam Epitaxy Workshop
|x 1069-3351
|w (DLC) 94658569
|w (OCoLC)27992608
|
| 787 |
1 |
|
|a International Symposium on Electron, Ion, and Photon Beams.
|t Proceedings of the ... International Symposium on Electron, Ion, and Photon Beams
|x 1063-9586
|w (DLC) 92657341
|w (OCoLC)26149287
|
| 852 |
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|p Can circulate
|a CAVAL
|b CAVAL
|c CAVAL
|d CARM 1 Store
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