Journal of vacuum science & technology. an official journal of the American Vacuum Society. B, Microelectronics processing and phenomena :

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Nuovo titolo:Journal of vacuum science & technology. B, Microelectronics and nanometer structures
Titolo precedente:Journal of vacuum science and technology
Enti autori: American Vacuum Society, American Institute of Physics
Natura: Periodico
Lingua:English
Pubblicazione: New York, N.Y. : Published for the Society by the American Institute of Physics, 1983-c1990.
Soggetti:
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210 0 |a J. vac. sci. technol., B Microelectron. process. phenom 
222 0 |a Journal of vacuum science & technology. B, Microelectronics processing and phenomena 
245 0 0 |a Journal of vacuum science & technology.  |n B,  |p Microelectronics processing and phenomena :  |b an official journal of the American Vacuum Society. 
246 3 0 |a Journal of vacuum science and technology.  |n B,  |p Microelectronics processing and phenomena 
246 3 0 |a Microelectronics processing and phenomena 
260 |a New York, N.Y. :  |b Published for the Society by the American Institute of Physics,  |c 1983-c1990. 
300 |a 8 v. :  |b ill. ;  |c 29 cm. 
310 |a Bimonthly,  |b <Jan./Feb. 1985-> 
321 |a Quarterly,  |b Jan.-Mar. 1983- 
362 0 |a 2nd ser., v. 1, no. 1 (Jan.-Mar. 1983)-2nd ser., v. 8, no. 6 (Nov./Dec. 1990). 
500 |a Title from cover. 
510 1 |a Computer & control abstracts  |x 0036-8113  |b Jan.-March 1983- 
510 1 |a Electrical & electronics abstracts  |x 0036-8105  |b Jan.-March 1983- 
510 1 |a Physics abstracts. Science abstracts. Series A  |x 0036-8091  |b Jan.-March 1983- 
510 1 |a SPIN  |b 1983- 
510 2 |a Chemical abstracts  |x 0009-2258 
510 2 |a Coal abstracts  |x 0309-4979 
510 2 |a Current physics index  |x 0098-9819 
510 2 |a Metals abstracts  |x 0026-0924 
510 2 |a World aluminum abstracts  |x 0002-6697 
530 |a Issued also on microfilm. 
580 |a Includes: International Symposium on Electron, Ion, and Photon Beams. Proceedings of the ... International Symposium on Electron, Ion, and Photon Beams; and: Molecular Beam Epitaxy Workshop. Proceedings of the ... Molecular Beam Epitaxy Workshop, also issued separately. 
650 0 |a Vacuum technology  |x Periodicals. 
710 2 |a American Vacuum Society. 
710 2 |a American Institute of Physics. 
780 0 1 |t Journal of vacuum science and technology  |x 0022-5355  |w (DLC) 68053979  |w (OCoLC)1754855 
785 0 0 |t Journal of vacuum science & technology. B, Microelectronics and nanometer structures  |x 1071-1023  |w (DLC) 94657460  |w (OCoLC)23276603 
787 1 |a Molecular Beam Epitaxy Workshop.  |t Proceedings of the ... Molecular Beam Epitaxy Workshop  |x 1069-3351  |w (DLC) 94658569  |w (OCoLC)27992608 
787 1 |a International Symposium on Electron, Ion, and Photon Beams.  |t Proceedings of the ... International Symposium on Electron, Ion, and Photon Beams  |x 1063-9586  |w (DLC) 92657341  |w (OCoLC)26149287 
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