Electron beam interactions with solids for microscopy, microanalysis & microlithography : proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA /
保存先:
団体著者: | |
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その他の著者: | |
フォーマット: | 会議録 図書 |
言語: | English |
出版事項: |
AMF O'Hare [Chicago], IL :
Scanning Electron Microscopy, Inc.,
c1984.
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主題: |
物理的記述: | xii, 372 p. : ill. ; 29 cm. |
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書誌: | Includes bibliographies and indexes. |
ISBN: | 0931288304 |