Electron beam interactions with solids for microscopy, microanalysis & microlithography : proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA /

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書目詳細資料
企業作者: Pfefferkorn Conference Monterey, Calif.
其他作者: Kyser, David F.
格式: Conference Proceeding 圖書
語言:English
出版: AMF O'Hare [Chicago], IL : Scanning Electron Microscopy, Inc., c1984.
主題:
實物特徵
實物描述:xii, 372 p. : ill. ; 29 cm.
參考書目:Includes bibliographies and indexes.
ISBN:0931288304