Semiconductor fabrication : technology and metrology /

Semiconductor fabrication : technology and metrology /

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Bibliographic Details
Corporate Authors: ASTM Committee F-1 on Electronics, Semiconductor Equipment and Materials Institute, Symposium on Semiconductor Processing
Other Authors: Gupta, D. C. (Dinesh C.)
Format: Conference Proceeding Book
Language:English
Published: Philadelphia, PA : ASTM, c1989.
Series:ASTM special technical publication ; 990.
Subjects:
Semiconductors > Design and construction > Congresses.

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