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| LEADER |
01614cam a2200337 a 4500 |
| 001 |
c000224686 |
| 003 |
CARM |
| 005 |
20061030143914.0 |
| 008 |
890418s1989 paua b 101 0 eng |
| 019 |
1 |
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|a 6470962
|5 LACONCORD2021
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| 020 |
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|a 0803112734
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| 035 |
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|a (OCoLC)19723356
|5 LACONCORD2021
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| 040 |
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|a LC
|b eng
|c LC
|d LC
|
| 050 |
0 |
0 |
|a TK7871.85
|b .S4617 1989
|
| 082 |
0 |
0 |
|a 621.381/52
|2 20
|
| 245 |
0 |
0 |
|a Semiconductor fabrication :
|b technology and metrology /
|c Dinesh C. Gupta, editor.
|
| 260 |
|
|
|a Philadelphia, PA :
|b ASTM,
|c c1989.
|
| 300 |
|
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|a 476 p. :
|b ill. ;
|c 24 cm.
|
| 490 |
1 |
|
|a STP ;
|v 990
|
| 500 |
|
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|a Papers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Electronics and Semiconductor Equipment & Materials Institute.
|
| 500 |
|
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|a "ASTM publication code number (PCN) 04-990000-46"--T.p. verso.
|
| 504 |
|
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|a Includes bibliographical references and indexes.
|
| 650 |
|
0 |
|a Semiconductors
|x Design and construction
|x Congresses.
|
| 700 |
1 |
|
|a Gupta, D. C.
|q (Dinesh C.)
|
| 710 |
2 |
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|a ASTM Committee F-1 on Electronics.
|
| 710 |
2 |
|
|a Semiconductor Equipment and Materials Institute.
|
| 711 |
2 |
|
|a Symposium on Semiconductor Processing
|n (5th :
|d 1988 :
|c Santa Clara, Calif.)
|
| 830 |
|
0 |
|a ASTM special technical publication ;
|v 990.
|
| 852 |
8 |
|
|b CARM
|h A2:AN18G0
|i C08381
|p 0315664
|f BK
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| 999 |
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| 952 |
f |
f |
|p Can circulate
|a CAVAL
|b CAVAL
|c CAVAL
|d CARM 1 Store
|e C08381
|f A2:AN18G0
|h Other scheme
|i book
|m 0315664
|