User's manual for the program MONSEL-1 : Monte Carlo simulation of SEM signals for linewidth metrology /

User's manual for the program MONSEL-1 : Monte Carlo simulation of SEM signals for linewidth metrology /

में बचाया:
ग्रंथसूची विवरण
मुख्य लेखक: Lowney, J. R. (Jeremiah Ralph), 1946-
निगमित लेखक: National Institute of Standards and Technology (U.S.)
अन्य लेखक: Marx, Egon
स्वरूप: पुस्तक
भाषा:English
प्रकाशित: Gaithersburg, MD : Washington, DC : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O., 1994.
श्रृंखला:Semiconductor measurement technology
NIST special publication ; 400-95
विषय:
Scanning electron microscopy > Computer programs > Handbooks, manuals, etc.
Electrons > Scattering > Mathematical models > Computer programs > Handbooks, manuals, etc.
Monte Carlo method > Computer programs > Handbooks, manuals, etc.
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040 |a NRL  |b eng  |c NRL  |d OCL  |d UWA  |d OCoLC 
100 1 |a Lowney, J. R.  |q (Jeremiah Ralph),  |d 1946- 
245 1 0 |a User's manual for the program MONSEL-1 :  |b Monte Carlo simulation of SEM signals for linewidth metrology /  |c Jeremiah R. Lowney and Egon Marx. 
260 |a Gaithersburg, MD :  |b U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ;  |a Washington, DC :  |b For sale by the Supt. of Docs., U.S. G.P.O.,  |c 1994. 
300 |a iv, 39 p. :  |b ill. ;  |c 28 cm. 
440 0 |a Semiconductor measurement technology 
440 0 |a NIST special publication ;  |v 400-95 
500 |a Distributed to depository libraries in microfiche. 
500 |a "August 1994." 
504 |a Includes bibliographical references. 
650 0 |a Scanning electron microscopy  |x Computer programs  |v Handbooks, manuals, etc. 
650 0 |a Electrons  |x Scattering  |x Mathematical models  |x Computer programs  |v Handbooks, manuals, etc. 
650 0 |a Monte Carlo method  |x Computer programs  |v Handbooks, manuals, etc. 
700 1 |a Marx, Egon. 
710 2 |a National Institute of Standards and Technology (U.S.) 
852 8 |b CARM  |h A2:AF26H0  |i F01125  |p 0268078  |f BK 
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952 f f |p Can circulate  |a CAVAL  |b CAVAL  |c CAVAL  |d CARM 1 Store  |e F01125  |f A2:AF26H0  |h Other scheme  |i book  |m 0268078 

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