User's manual for the program MONSEL-1 : Monte Carlo simulation of SEM signals for linewidth metrology /

User's manual for the program MONSEL-1 : Monte Carlo simulation of SEM signals for linewidth metrology /

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Detalles Bibliográficos
Autor Principal: Lowney, J. R. (Jeremiah Ralph), 1946-
Autor Corporativo: National Institute of Standards and Technology (U.S.)
Outros autores: Marx, Egon
Formato: Libro
Idioma:English
Publicado: Gaithersburg, MD : Washington, DC : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O., 1994.
Series:Semiconductor measurement technology
NIST special publication ; 400-95
Subjects:
Scanning electron microscopy > Computer programs > Handbooks, manuals, etc.
Electrons > Scattering > Mathematical models > Computer programs > Handbooks, manuals, etc.
Monte Carlo method > Computer programs > Handbooks, manuals, etc.

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