User's manual for the program MONSEL-1 : Monte Carlo simulation of SEM signals for linewidth metrology /

User's manual for the program MONSEL-1 : Monte Carlo simulation of SEM signals for linewidth metrology /

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书目详细资料
主要作者: Lowney, J. R. (Jeremiah Ralph), 1946-
企业作者: National Institute of Standards and Technology (U.S.)
其他作者: Marx, Egon
格式: 图书
语言:English
出版: Gaithersburg, MD : Washington, DC : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O., 1994.
丛编:Semiconductor measurement technology
NIST special publication ; 400-95
主题:
Scanning electron microscopy > Computer programs > Handbooks, manuals, etc.
Electrons > Scattering > Mathematical models > Computer programs > Handbooks, manuals, etc.
Monte Carlo method > Computer programs > Handbooks, manuals, etc.

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索引号: A2:AF26H0 F01125
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