Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems /
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| Main Author: | |
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| Corporate Author: | |
| Format: | Book |
| Language: | English |
| Published: |
Gaithersburg, MD : Washington, D.C. :
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O,
[1997].
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| Series: | Standard reference materials
NIST special publication ; 260-129 |
| Subjects: |
CARM 1 Store
| Call Number: |
A2:AB20H0 F01121 |
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| Copy 1 | Available Place a Hold |