Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems /

Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems /

Saved in:
Bibliographic Details
Main Author: Potzick, James E.
Corporate Author: National Institute of Standards and Technology (U.S.)
Format: Book
Language:English
Published: Gaithersburg, MD : Washington, D.C. : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O, [1997].
Series:Standard reference materials
NIST special publication ; 260-129
Subjects:
Microscopes > Calibration > Standards.
Integrated circuits > Masks > Measurement.
Chromium > Spectra > Standards.
Description
Item Description:"Issued February 1997."
Physical Description:xiii, 23 p. : ill. ; 28 cm.
Bibliography:Includes bibliographical references (p. 17-18)

Similar Items