Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems /
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| Hlavní autor: | |
|---|---|
| Korporativní autor: | |
| Médium: | Kniha |
| Jazyk: | English |
| Vydáno: |
Gaithersburg, MD : Washington, D.C. :
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O,
[1997].
|
| Edice: | Standard reference materials
NIST special publication ; 260-129 |
| Témata: |
| LEADER | 01666cam a2200349 a 4500 | ||
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| 001 | c000225830 | ||
| 003 | CARM | ||
| 005 | 20061123152909.0 | ||
| 008 | 971006s1997 mdua b f000 0 eng | ||
| 010 | |a 97176955 | ||
| 019 | 1 | |a 13456551 |5 LACONCORD2021 | |
| 035 | |a (OCoLC)38113027 |5 LACONCORD2021 | ||
| 040 | |a LC |b eng |c LC |d LC | ||
| 050 | 0 | 0 | |a QC100 |b .U57 no. 260-129 |a no. 260-129 |
| 082 | 0 | 0 | |a 602/.18 s |2 21 |
| 082 | 0 | 0 | |a 502.82 |2 21 |
| 100 | 1 | |a Potzick, James E. | |
| 245 | 1 | 0 | |a Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems / |c James E. Potzick. |
| 246 | 3 | 0 | |a Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems |
| 260 | |a Gaithersburg, MD : |b U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; |a Washington, D.C. : |b For sale by the Supt. of Docs., U.S. G.P.O, |c [1997]. | ||
| 300 | |a xiii, 23 p. : |b ill. ; |c 28 cm. | ||
| 440 | 0 | |a Standard reference materials | |
| 440 | 0 | |a NIST special publication ; |v 260-129 | |
| 500 | |a "Issued February 1997." | ||
| 504 | |a Includes bibliographical references (p. 17-18) | ||
| 650 | 0 | |a Microscopes |x Calibration |x Standards. | |
| 650 | 0 | |a Integrated circuits |x Masks |x Measurement. | |
| 650 | 0 | |a Chromium |x Spectra |x Standards. | |
| 710 | 2 | |a National Institute of Standards and Technology (U.S.) | |
| 852 | 8 | |b CARM |h A2:AB20H0 |i F01121 |p 0268141 |f BK | |
| 999 | f | f | |i 5509c76d-ba36-526b-ac18-7a24a4480ba9 |s a646a31d-64f8-53c8-987d-1c23e763929c |
| 952 | f | f | |p Can circulate |a CAVAL |b CAVAL |c CAVAL |d CARM 1 Store |e F01121 |f A2:AB20H0 |h Other scheme |i book |m 0268141 |