Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems /

Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems /

Na minha lista:
Detalhes bibliográficos
Autor principal: Potzick, James E.
Autor Corporativo: National Institute of Standards and Technology (U.S.)
Formato: Livro
Idioma:English
Publicado em: Gaithersburg, MD : Washington, D.C. : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O, [1997].
Colecção:Standard reference materials
NIST special publication ; 260-129
Assuntos:
Microscopes > Calibration > Standards.
Integrated circuits > Masks > Measurement.
Chromium > Spectra > Standards.

CARM 1 Store

Detalhes do Exemplar CARM 1 Store
Área/Cota: A2:AB20H0 F01121
Cód. Barras: 1 Disponível  Localização

Registos relacionados