The certification of 100 mm diameter silicon resistivity SRMs 2541 through 2547 using dual-configuration four-point probe measurements /

The certification of 100 mm diameter silicon resistivity SRMs 2541 through 2547 using dual-configuration four-point probe measurements /

Guardat en:
Dades bibliogràfiques
Autor principal: Ehrstein, James R.
Autor corporatiu: National Institute of Standards and Technology (U.S.)
Altres autors: Croarkin, M. C. (Mary Carroll), 1934-
Format: Llibre
Idioma:English
Publicat: Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, 1999.
Edició:1999 edition.
Col·lecció:Standard reference materials
NIST special publication ; 260-131
Matèries:
Silicon.
Silicon > Electric properties.

CARM 1 Store

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Signatura: A2:AB22H0 F01159
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