The certification of 100 mm diameter silicon resistivity SRMs 2541 through 2547 using dual-configuration four-point probe measurements /
保存先:
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| 団体著者: | |
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| フォーマット: | 図書 |
| 言語: | English |
| 出版事項: |
Gaithersburg, MD :
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,
1999.
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| 版: | 1999 edition. |
| シリーズ: | Standard reference materials
NIST special publication ; 260-131 |
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| 記述事項: | "Issued June 1999." |
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| 物理的記述: | vi, 105 p. : ill. ; 28 cm. |
| 書誌: | Includes bibliographical references. |