Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems /

Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems /

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Dettagli Bibliografici
Autore principale: Vezzetti, Carol F.
Ente Autore: National Institute of Standards and Technology (U.S.)
Altri autori: Varner, Ruth N., Potzick, James E.
Natura: Libro
Lingua:English
Pubblicazione: Gaithersburg, Md. : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, 1992.
Serie:Standard reference materials
NIST special publication ; 260-117
Soggetti:
Microscopes > Calibration > Standards.
Integrated circuits > Masks > Measurement.
Chromium > Spectra > Standards.

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