Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems /

Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems /

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Bibliographic Details
Main Author: Vezzetti, Carol F.
Corporate Author: National Institute of Standards and Technology (U.S.)
Other Authors: Varner, Ruth N., Potzick, James E.
Format: Book
Language:English
Published: Gaithersburg, Md. : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, 1992.
Series:Standard reference materials
NIST special publication ; 260-117
Subjects:
Microscopes > Calibration > Standards.
Integrated circuits > Masks > Measurement.
Chromium > Spectra > Standards.
Description
Item Description:"Issued January 1992".
Physical Description:xi, 37 p. : ill. ; 28 cm.
Bibliography:Includes bibliographical references (p. 34)

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