Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems /

Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems /

Kaydedildi:
Detaylı Bibliyografya
Yazar: Vezzetti, Carol F.
Müşterek Yazar: National Institute of Standards and Technology (U.S.)
Diğer Yazarlar: Varner, Ruth N., Potzick, James E.
Materyal Türü: Kitap
Dil:English
Baskı/Yayın Bilgisi: Gaithersburg, Md. : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, 1992.
Seri Bilgileri:Standard reference materials
NIST special publication ; 260-117
Konular:
Microscopes > Calibration > Standards.
Integrated circuits > Masks > Measurement.
Chromium > Spectra > Standards.
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100 1 |a Vezzetti, Carol F. 
245 1 0 |a Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems /  |c Carol F. Vezzetti, Ruth N. Varner, James E. Potzick. 
260 |a Gaithersburg, Md. :  |b U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,  |c 1992. 
300 |a xi, 37 p. :  |b ill. ;  |c 28 cm. 
440 0 |a Standard reference materials 
440 0 |a NIST special publication ;  |v 260-117 
500 |a "Issued January 1992". 
504 |a Includes bibliographical references (p. 34) 
650 0 |a Microscopes  |x Calibration  |x Standards. 
650 0 |a Integrated circuits  |x Masks  |x Measurement. 
650 0 |a Chromium  |x Spectra  |x Standards. 
700 1 |a Varner, Ruth N. 
700 1 |a Potzick, James E. 
710 2 |a National Institute of Standards and Technology (U.S.) 
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