Modeling the process dependence of electrical charges associated with the silicon/silicon-dioxide interface /

Modeling the process dependence of electrical charges associated with the silicon/silicon-dioxide interface /

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Bibliographic Details
Main Author: Akinwande, Akintunde Ibitayo
Format: Thesis Book
Language:English
Published: Ann Arbor, MI : University Microfilms International, c1987.
Subjects:
Silicon > Electric properties.
Silicon dioxide > Electric properties.
Oxidation.
Integrated circuits > Passivation.

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