Film deposition by plasma techniques /
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Berlin ; New York :
Springer-Verlag,
c1992.
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| Series: | Springer series on atoms + plasmas ;
10 |
| Subjects: |
CARM 1 Store
| Call Number: |
A1:AQ08F0 C10697 |
|---|---|
| Copy 1 | Available Place a Hold |