Film deposition by plasma techniques /
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| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Berlin ; New York :
Springer-Verlag,
c1992.
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| Series: | Springer series on atoms + plasmas ;
10 |
| Subjects: |
| Item Description: | Based on: Purazuma to seimaku no kiso / Mitsuharu Konuma. Cf. Pref. |
|---|---|
| Physical Description: | ix, 224 p. : ill. ; 24 cm. |
| Bibliography: | Includes bibliographical references (p. 216-220) and index. |
| ISBN: | 0387525947 (U.S.) 3540540571 (Berlin : acid-free paper) 0387540571 (New York : acid-free paper) 3540525947 |