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| LEADER |
01361cam a2200337 a 4500 |
| 001 |
c000281202 |
| 003 |
CARM |
| 005 |
20080303113834.0 |
| 008 |
920703s1992 gw a b 001 0 eng |
| 019 |
1 |
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|a 9170747
|5 LACONCORD2021
|
| 020 |
|
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|a 0387525947 (U.S.)
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| 020 |
|
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|a 3540540571 (Berlin : acid-free paper)
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| 020 |
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|a 0387540571 (New York : acid-free paper)
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| 020 |
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|a 3540525947
|
| 035 |
|
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|a (OCoLC)24667826
|5 LACONCORD2021
|
| 040 |
|
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|a LC
|b eng
|c LC
|
| 050 |
0 |
0 |
|a TK7871.15.F5
|b K58 1991
|
| 082 |
0 |
0 |
|a 621.381/52
|2 20
|
| 100 |
1 |
|
|a Konuma, Mitsuharu,
|d 1950-
|
| 245 |
1 |
0 |
|a Film deposition by plasma techniques /
|c Mitsuharu Konuma.
|
| 260 |
|
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|a Berlin ;
|a New York :
|b Springer-Verlag,
|c c1992.
|
| 300 |
|
|
|a ix, 224 p. :
|b ill. ;
|c 24 cm.
|
| 440 |
|
0 |
|a Springer series on atoms + plasmas ;
|v 10
|
| 500 |
|
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|a Based on: Purazuma to seimaku no kiso / Mitsuharu Konuma. Cf. Pref.
|
| 504 |
|
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|a Includes bibliographical references (p. 216-220) and index.
|
| 650 |
|
0 |
|a Thin films.
|
| 650 |
|
0 |
|a Plasma-enhanced chemical vapor deposition.
|
| 700 |
1 |
|
|a Konuma, Mitsuharu,
|d 1950-.
|t Purazuma to seimaku no kiso.
|
| 852 |
8 |
|
|b CARM
|h A1:AQ08F0
|i C10697
|p 0498439
|f BK
|
| 999 |
f |
f |
|i 15d48544-0054-522a-ace7-cdc4a15472ec
|s bd596805-3a63-5030-aa1e-54de16016c64
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| 952 |
f |
f |
|p Can circulate
|a CAVAL
|b CAVAL
|c CAVAL
|d CARM 1 Store
|e C10697
|f A1:AQ08F0
|h Other scheme
|i book
|m 0498439
|