Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas /

Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas /

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Bibliographische Detailangaben
Körperschaft: Society of Photo-optical Instrumentation Engineers
Weitere Verfasser: Chen, Ray T., Lowell, John, Mathur, Jagdish P.
Format: Buch
Sprache:English
Veröffentlicht: Bellingham, Wash. : SPIE, 1996.
Schriftenreihe:Proceedings of SPIE--the International Society for Optical Engineering ; v. 2877.
Schlagworte:
Integrated circuits industry > Congresses.
Manufacturing processes > Congresses.
Semiconductors > Design and construction > Congresses.
Integrated circuits > Design and construction > Congresses.
Semiconductors > Testing > Optical methods > Congresses.
Optical detectors > Congresses.

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