Evaluating a chip, wafer, or lot using SUXES, SPICE, and STAT2 /
Gespeichert in:
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| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Gaithersburg, MD : Washington, DC :
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O.,
1992.
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| Schriftenreihe: | Semiconductor measurement technology
NIST special publication ; 400-90 |
| Schlagworte: |
| Beschreibung: | "April 1992." |
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| Beschreibung: | iv, 140 p. : ill. ; 28 cm. |
| Bibliographie: | Includes bibliographical references (p. 41-42) |