Evaluating a chip, wafer, or lot using SUXES, SPICE, and STAT2 /

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: Marshall, J. C. (Janet C.)
Körperschaft: National Institute of Standards and Technology (U.S.)
Weitere Verfasser: Mattis, Richard L.
Format: Buch
Sprache:English
Veröffentlicht: Gaithersburg, MD : Washington, DC : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O., 1992.
Schriftenreihe:Semiconductor measurement technology
NIST special publication ; 400-90
Schlagworte:
Beschreibung
Beschreibung:"April 1992."
Beschreibung:iv, 140 p. : ill. ; 28 cm.
Bibliographie:Includes bibliographical references (p. 41-42)