Semiconductor measurement technology : survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry /
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Main Author: | |
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Other Authors: | , |
Format: | Book |
Language: | English |
Published: |
Gaithersburg, MD :
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,
1995.
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Series: | NIST special publication ;
400-98 |
Subjects: |
CARM 1 Store
Call Number: |
A3:AE31C0 F06472 |
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Copy 1 | Available Place a Hold |