APA aipamena

Bullis, W. M., Seiler, D. G., & Perkowitz, S. (1995). Semiconductor measurement technology: Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry. U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology.

Chicago Style aipamena

Bullis, W. Murray, David G. Seiler, and S. Perkowitz. Semiconductor Measurement Technology: Survey of Optical Characterization Methods for Materials, Processing, and Manufacturing in the Semiconductor Industry. Gaithersburg, MD: U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, 1995.

MLA aipamena

Bullis, W. Murray, et al. Semiconductor Measurement Technology: Survey of Optical Characterization Methods for Materials, Processing, and Manufacturing in the Semiconductor Industry. U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, 1995.