Bullis, W. M., Seiler, D. G., & Perkowitz, S. (1995). Semiconductor measurement technology: Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry. U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology.
Citazione stile Chigago Style (17a edizione)Bullis, W. Murray, David G. Seiler, e S. Perkowitz. Semiconductor Measurement Technology: Survey of Optical Characterization Methods for Materials, Processing, and Manufacturing in the Semiconductor Industry. Gaithersburg, MD: U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, 1995.
Citatione MLA (8a ed.)Bullis, W. Murray, et al. Semiconductor Measurement Technology: Survey of Optical Characterization Methods for Materials, Processing, and Manufacturing in the Semiconductor Industry. U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, 1995.