Semiconductor measurement technology : survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry /

में बचाया:

ग्रंथसूची विवरण
मुख्य लेखक:	Bullis, W. Murray, 1930-
अन्य लेखक:	Seiler, David G., Perkowitz, S.
स्वरूप:	पुस्तक
भाषा:	English
प्रकाशित:	Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, 1995.
श्रृंखला:	NIST special publication ; 400-98
विषय:	Semiconductors > Testing > Optical methods. Semiconductors > Characterization.

विवरण
वस्तु वर्णन:	"December 1995."
भौतिक वर्णन:	iv, 51 p. ; 28 cm.
ग्रन्थसूची:	Includes bibliographical references.

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