Semiconductor measurement technology : survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry /
Saved in:
| Hovedforfatter: | |
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| Andre forfattere: | , |
| Format: | Bog |
| Sprog: | English |
| Udgivet: |
Gaithersburg, MD :
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,
1995.
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| Serier: | NIST special publication ;
400-98 |
| Fag: |
| Emne beskrivelse: | "December 1995." |
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| Fysisk beskrivelse: | iv, 51 p. ; 28 cm. |
| Bibliografi: | Includes bibliographical references. |