Semiconductor measurement technology : survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry /
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| Autore principale: | |
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| Altri autori: | , |
| Natura: | Libro |
| Lingua: | English |
| Pubblicazione: |
Gaithersburg, MD :
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,
1995.
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| Serie: | NIST special publication ;
400-98 |
| Soggetti: |
| Descrizione del documento: | "December 1995." |
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| Descrizione fisica: | iv, 51 p. ; 28 cm. |
| Bibliografia: | Includes bibliographical references. |