Semiconductor measurement technology : survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry /

Semiconductor measurement technology : survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry /

Kaydedildi:
Detaylı Bibliyografya
Yazar: Bullis, W. Murray, 1930-
Diğer Yazarlar: Seiler, David G., Perkowitz, S.
Materyal Türü: Kitap
Dil:English
Baskı/Yayın Bilgisi: Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, 1995.
Seri Bilgileri:NIST special publication ; 400-98
Konular:
Semiconductors > Testing > Optical methods.
Semiconductors > Characterization.
LEADER 01322cam a2200289 a 4500
001 c000292243
003 CARM
005 20090525082707.0
008 960913s1995 mdu 000 0 eng d
019 1 |a 12654382  |5 LACONCORD2021 
035 |a (OCoLC)222153810  |5 LACONCORD2021 
040 |a WU  |b eng  |c WU 
100 1 |a Bullis, W. Murray,  |d 1930- 
245 1 0 |a Semiconductor measurement technology :  |b survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry /  |c W. Murray Bullis, S. Perkowitz, D.G. Seiler. 
260 |a Gaithersburg, MD :  |b U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,  |c 1995. 
300 |a iv, 51 p. ;  |c 28 cm. 
490 1 |a NIST special publication ;  |v 400-98 
500 |a "December 1995." 
504 |a Includes bibliographical references. 
650 0 |a Semiconductors  |x Testing  |x Optical methods. 
650 0 |a Semiconductors  |x Characterization. 
700 1 |a Seiler, David G. 
700 1 |a Perkowitz, S. 
830 0 |a NIST special publication ;  |v 400-98 
852 8 |b CARM  |h A3:AE31C0  |i F06472  |p 0516596  |f BK 
999 f f |i 467e2ebe-874e-5e0d-8d20-deb8c2bbddae  |s f22a9ff9-ed6a-5bc3-817d-0982884b11a6 
952 f f |p Can circulate  |a CAVAL  |b CAVAL  |c CAVAL  |d CARM 1 Store  |e F06472  |f A3:AE31C0  |h Other scheme  |i book  |m 0516596 

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