Semiconductor measurement technology : survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry /
Guardat en:
| Autor principal: | |
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| Altres autors: | , |
| Format: | Llibre |
| Idioma: | English |
| Publicat: |
Gaithersburg, MD :
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,
1995.
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| Col·lecció: | NIST special publication ;
400-98 |
| Matèries: |
CARM 1 Store
| Signatura: |
A3:AE31C0 F06472 |
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| Còpia 1 | Disponible Fer una reserva |