Semiconductor measurement technology : survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry /
Wedi'i Gadw mewn:
| Prif Awdur: | |
|---|---|
| Awduron Eraill: | , |
| Fformat: | Llyfr |
| Iaith: | English |
| Cyhoeddwyd: |
Gaithersburg, MD :
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,
1995.
|
| Cyfres: | NIST special publication ;
400-98 |
| Pynciau: |
CARM 1 Store
| Rhif Galw: |
A3:AE31C0 F06472 |
|---|---|
| Copi 1 | Ar gael Gwneud Cais |