Semiconductor measurement technology : survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry /
Guardado en:
| Autor principal: | |
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| Otros Autores: | , |
| Formato: | Libro |
| Lenguaje: | English |
| Publicado: |
Gaithersburg, MD :
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,
1995.
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| Colección: | NIST special publication ;
400-98 |
| Materias: |
CARM 1 Store
| Número de Clasificación: |
A3:AE31C0 F06472 |
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| Copia 1 | Disponible Hacer reserva |