Semiconductor measurement technology : survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry /
Sábháilte in:
| Príomhchruthaitheoir: | |
|---|---|
| Rannpháirtithe: | , |
| Formáid: | LEABHAR |
| Teanga: | English |
| Foilsithe / Cruthaithe: |
Gaithersburg, MD :
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,
1995.
|
| Sraith: | NIST special publication ;
400-98 |
| Ábhair: |
CARM 1 Store
| Gairmuimhir: |
A3:AE31C0 F06472 |
|---|---|
| Cóip 1 | Ar fáil Cuir coinneáil air |