Semiconductor measurement technology : thin film reference materials development final report for CRADA CN-1364 /
Gorde:
| Formatua: | Liburua |
|---|---|
| Hizkuntza: | Undetermined |
| Argitaratua: |
Gaithersburg, MD :
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,
1998.
|
| Saila: | 830NIST special publication ;
400-100 |
| Gaiak: |
| Deskribapen fisikoa: | 38 p. ; 29 cm. |
|---|