Handbook of multilevel metallization for integrated circuits : materials, technology, and applications /
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| Other Authors: | , , |
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| Format: | Book |
| Language: | English |
| Published: |
Park Ridge, N.J., U.S.A. :
Noyes,
c1993.
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| Series: | Materials science and process technology series
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| Subjects: | |
| Online Access: | Publisher description |
| Physical Description: | xxiii, 887 p. : ill. ; 25 cm. Also available online via the World Wide Web, by subscription to Knovel. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 1591243645 (electronic bk.) 0815513402 (hbk.) |