User's manual for the program MONSEL-1 : Monte Carlo simulation of SEM signals for linewidth metrology /

User's manual for the program MONSEL-1 : Monte Carlo simulation of SEM signals for linewidth metrology /

Saved in:
Bibliographic Details
Main Author: Lowney, J. R. (Jeremiah Ralph), 1946-
Corporate Author: National Institute of Standards and Technology (U.S.)
Other Authors: Marx, Egon
Format: Book
Language:English
Published: Gaithersburg, MD : Washington, DC : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O., 1994.
Series:Semiconductor measurement technology
NIST special publication ; 400-95
Subjects:
Scanning electron microscopy > Computer programs > Handbooks, manuals, etc.
Electrons > Scattering > Mathematical models > Computer programs > Handbooks, manuals, etc.
Monte Carlo method > Computer programs > Handbooks, manuals, etc.

CARM 1 Store

Holdings details from CARM 1 Store
Call Number: A2:AF26H0 F01125
Copy 1 Available  Place a Hold

Similar Items