Semiconductor measurement technology : survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry /
Salvato in:
| Autore principale: | |
|---|---|
| Altri autori: | , |
| Natura: | Libro |
| Lingua: | English |
| Pubblicazione: |
Gaithersburg, MD :
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,
1995.
|
| Serie: | NIST special publication ;
400-98 |
| Soggetti: |
CARM 1 Store
| Collocazione: |
A3:AE31C0 F06472 |
|---|---|
| Copia 1 | Disponibile Richiedi |