Semiconductor measurement technology : survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry /
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| 主要作者: | |
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| 其他作者: | , |
| 格式: | 圖書 |
| 語言: | English |
| 出版: |
Gaithersburg, MD :
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,
1995.
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| 叢編: | NIST special publication ;
400-98 |
| 主題: |
CARM 1 Store
| 索引號: |
A3:AE31C0 F06472 |
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| 復印件 1 | 可用 預訂 |